Technology and Trends

If you think the world is flooded with a mind-boggling volume of digital content, then you might be just a amazed to learn about the sheer wealth of information and business opportunities that will be uncovered at this year’s SEMICON Japan as the event goes full digital.To start, more than 160 companies will exhibit their semiconductor manufacturing gear and services on the virtual show floor of Japan’s premier event for the semiconductor manufacturing and design supply chain. Add to that over 80 presentations and panels that feature global industry executives, visionaries and experts offering insights into the latest microelectronics developments, trends and technologies, and it’s easy to see how SEMICON Japan 2020 Virtual is designed to help attendees grow their businesses and the industry drive the next wave of innovations that promise to address some of the world’s greatest challenges across healthcare, the environment, transportation and other industries.Best of all, it will all be available at your convenience from your office or home 24 hours a day, making it safe and easy for you and others from all over the world to attend. Following is what’s in store at SEMICON Japan 2020 Virtual to help lead you into the future.Leading Japanese Securities Analysts to Weigh in What’s Ahead for the Chip Equipment Sector in 2021 For the first time, SEMICON Japan will feature Bulls Bears as Japan’s’ five top securities analysts focus on the 2021 outlook for the global semiconductor equipment sector. The December 17th event will include discussions on the COVID-19 pandemic’s impact on the semiconductor industry, the continuing geopolitical tensions that are forcing the industry to reconfigure its supply chains, the fast-growing China market and cutting-edge applications that are powering industry growth. The perspectives from Japan’s investment community are sure to be compelling as the region supplies one-third of the global semiconductor industry’s chip manufacturing equipment.Moderated by Akira Minamikawa of OMDIA, the panel will include these experts:Three Visionaries to Explore the Digital TransformationPowered by semiconductors, the fourth industrial revolution is driving digitalization globally, remaking societies to bring more efficiencies and conveniences to our work and home lives and help more people prosper. But the flip side of those tremendous benefits is the risk that wealth will be concentrated in the hands of people in positions of power, companies and nations. Democratizing economic development remains a serious challenge worldwide.Addressing this pressing issue, the Opening Panel on December 11 will feature prominent visionaries from political, academic and industrial communities including the following:Sony’s Leading-Edge Electric Car and Nissan’s Driver Assistance System to Highlight Automotive InnovationsCars are becoming more like smartphones on wheels, rapidly filling with more and more semiconductor chips every year with electrification and electronic driver-assisted systems to key drivers of this growth. At the SMART Mobility 1 session on December 14, two pioneering companies – Sony and Nissan Motor – will focus on both areas of semiconductor innovation.Sony’s Vision-S concept car, exhibited at CES 2020, astonished many in the electronics ecosystem and the automotive industry. What is Sony’s vision behind the vehicle? Izumi Kawanishi, Senior Vice President, AI Robotics Business at Sony will share the latest on the initiative.Nissan, maker of the pioneering LEAF electric vehicle, is the first Japanese carmaker to equip a car – its new Skyline – with the ProPILOT 2.0 driver assistance system for hands-off highway driving. Nissan Executive Vice President Asako Hoshino will provide an update on the company’s driver assistance system strategy and plans.Quantum Computing Meets Chip Manufacturing for the First Time at SEMICON Japan In contrast with current computer systems that use bits (binary 0 or 1 state) for computing, quantum computers leverage quantum superposition (0 and 1 states exist at once) to quickly solve highly complex problems that might take traditional supercomputers hundreds or even thousands of years to tease out. American physicist Richard Feynman promoted quantum computer as early as 1982, but it wasn’t until nearly two decades later and long after his death that quantum bit circuits emerged for use in superconductive materials.With quantum circuits and devices requiring state-of-art semiconductor processing technology, The Era of Quantum session on December 15 at SEMICON Japan 2020 Virtual will discuss necessary advances in chip manufacturing technology to enable the next generation quantum computing. The session will be the first time SEMICON Japan connects the semiconductor manufacturing and quantum computing communities.The program will feature the following experts:Strategies for Sustainable Semiconductor Industry GrowthSemiconductors are giving rise to a hyper-connected world that is fueling demand for staggering volumes of chips, pressuring the electronics industry to uncover new ways to increase manufacturing efficiency while reducing power consumption in a bid to help combat climate change. The Grand Finale Panel composed of executives from Japan’s semiconductor supply chain and a supervising ministry will gather for the Grand Finale Panel on December 18 to discuss ways the industry can achieve sustainable growth through innovation with a focus on energy savings and an new process technologies such as extreme ultraviolet lithography (EUV), which promises to enable electronics devices that are more power powerful, cheaper and more energy-efficient.Panelists include the following:Register TodayThe SEMICON Japan 2020 Virtual All-In Pass provides online access to all 80 presentations and panels, which will be available on-demand for replay until January 15, 2021. What’s more, all eight keynote programs will feature English subtitles. For complete information of the exposition, programs and registration, visit the SEMICON Japan website.I look forward to seeing you virtually at the event!Jim Hamajima is president of SEMI Japan.

D-SIMLAB Technologies, a Singapore-based provider of simulation-based business analytics and optimisation software solutions, recently joined SEMI. I spoke with Peter Lendermann, the company’s co-founder and Chief Business Development Officer, about the company’s role in the smart manufacturing movement, how customers are benefiting from D-SIMLAB solutions, and what the future holds for smart manufacturing. Ng: What is D-SIMLAB’s mission?Lendermann: Our mission is to develop, market, and deliver high-performance simulation-based decision support solutions that enable corporations to enhance their performance in a sustainable manner leading to significant cost savings. In particular, we focus on semiconductor manufacturing material flow planning and optimisation but also do business in aviation where we help customers optimise their spare parts support operations. What these two domains have in common are three important attributes: They are capital intensive, their underlying operations are complex, and operations are also heavily affected by random, i.e. unpredictable events, which makes both planning and execution of manufacturing operations very challenging. D-SIMLAB is a spin-off from the Singapore Institute of Manufacturing Technology (SIMTech) under the Agency for Science Technology and Research (A*STAR). Our head office is in Silicon Island Singapore. We also have representations in Germany and the U.S. Most of our staff are industrial and computer engineers with up to 20 years of operations experience in their respective industry domain, as well as vast data analytics and software development capability.Ng: What solutions does D-SIMLAB offer to optimise semiconductor manufacturing?Lendermann: In the three-pillar smart manufacturing framework of Connect, Sense and Predict advocated by SEMI, our focus is on Predict though we emphasise the equal importance of the subsequent Act: Our solutions can Predict, for example, WIP waves or usage-based preventive maintenance due dates. But much more value-add can be realised once some decisions with regard to how to Act can be derived from such a prediction. The ability to pro-actively adjust action plans in a timely manner is essential to overcoming challenges arising from changing customer due dates, mix profile changes, untimely production line issues, and production capacity to be shared with R D lots effectively, so that ultimately our customers can enhance capacity, reduce cycle times and improve the due-date performance of their factories.To that end, our D-SIMCON solution suite spans the full spectrum of decision-support tools required to forecast, manage and optimise material flow – from operational scheduling and dispatching, WIP forecasting and dynamic and static capacity planning all the way to specific applications for fab load mix optimisation or for the enhancement of the product/layer dedication and resist allocation in the lithography area. Our solutions are implemented in numerous 6-, 8- and 12-inch wafer fabs operated by both IDMs and foundries worldwide with capacity ranging from 40,000 to 200,000 wafers per month.Ng: What are the key enablers of D-SIMLAB’s success?Lendermann: Our success lies in deploying production-ready solutions for our customers, allowing them to extract immediate value. Our solutions enable the portrayal of many domain-specific characteristics such as queue time constraints or specific equipment behaviour, which is absolutely essential to generating operationally feasible plans or schedules in order to be able to Act in the best possible manner according to what has been Predicted. Moreover, we have modules for automatic generation, calibration and maintenance of the underlying capacity model, including resolution of data inconsistencies as well as verification and validation of the model, to allow near real-time responses to continuously changing operations. And the associated optimisation approaches focus on creating maximum possible value with as few iterations as possible and within minimum time through smart heuristics and parallel computing infrastructure – a paradigm that is as powerful as it is cost-effective.Ng: What are a few of your more notable customer successes?Lendermann: As a result of the first implementation of our novel, multi-objective based Scheduler cum Dispatcher, a tool capacity gain of 8%, a transportation capacity gain of 10%, and an operator workload reduction of 25% were concurrently realised at one of the critical equipment groups in our customer’s fab. At another set of equipment groups in the same fab, a 7% increase of lots within the critical queue time limiting area was achieved.Another use case we successfully realised is fine-tuning of Preventive Maintenance plans: Based on a seven-day lot arrival forecast at each equipment generated with our WIP Forecaster, a recommendation is made when PM would be best possible without causing too much disruption in the WIP flow. The effect of this synchronisation of the PM plan with material flow enabled a dramatic reduction of the average queue lengths at critical equipment groups and the associated cycle times without incurring any capacity loss. Reduction of average queue length as a result of synchronising preventive maintenance with material flow. Ng: What challenges has D-SIMLAB been facing in the COVID-19 world?Lendermann: Obviously, software delivery projects have become more challenging for the time being since our engineers cannot be on-site frequently. But it also turned out that more and more services can be delivered remotely, which has the nice side effect of making the services more cost-effective for customers. Overall, we are confident that our solid customer base will enable us to sail steadily through these challenging times.Ng: Where does D-SIMLAB see the technological development heading?Lendermann: In the future, enriching decision support and manufacturing execution solutions with machine learning and other AI techniques will be critical in reducing dependency on human experience. This path is essential to making manufacturing operations fully Industry 4.0-compliant. D-SIMLAB will certainly be at the forefront of this development. Bee Bee Ng is president of SEMI Southeast Asia.

The air we breathe is precious yet neglected as anthropogenic pollutants continue to pour into the earth’s atmosphere. Still, there’s hope that greenhouse gas emissions – and the human behavior behind them – can be brought under control for the good of the planet with the help of gas sensors that gauge pollutant levels.Of the many air pollutants, some are more detrimental to our health than others. Figure 1 lists the top seven pollutants, their chief sources and health effects. The Air Quality Index is calculated by combining values from particles and four gases (carbon monoxide, ozone, sulfur dioxide, nitrogen dioxide). The good news is that gas sensors are available in the market that can monitor each of those pollutants.Figure 1 – Top seven pollutants and their health effects. Source: EPA Air Sensor Guidebook The challenge is that many gas sensor end users today have little understanding of how to compare the performance characteristics of sensors offered by various vendors. SEMI is working to help end users clear that hurdle. SEMI-MSIG this year created a group within its Device Working Group focused on developing gas sensor standards aimed at growing the market and defining guidelines affecting areas including testing methods, reliability requirements, packaging and communication interfaces. Importantly, the standards will also make it easier for end users to make a clear choice among rival products.The SEMI-MSIG Device Working Group comprises devoted experts from leading gas sensor companies as well as OEMs. We welcome companies involved in deploying gas sensors to join this fast-growing group to improve air quality standards in sectors including residential construction, factory automation, automotive, consumer electronics and healthcare. One potential market is consumer electronics such as smart phones since concerns about air quality is growing among device users.The MEMS Sensors Industry Group (MSIG) Device Working group was formed in early 2019. Its mission is to develop a series of technical specifications, industry standards and best practices for MEMS and Sensor devices and platforms. The goal is to advance the use and expansion of MEMS and sensors worldwide.Table 1 – Top seven pollutants and their health effects. Source: EPA Air Sensor Guidebook In the past, we focused on inertial sensors (See IEEE2700 standard for inertial sensors as an example of an output of this team). In 2020, our focus shifted to gas sensors and we plan to expand our work to include other types of sensors in the near feature. Industry leaders such as Bosch, TDK Invensense, Renesas, Infineon, Analog devices, STMicroelectronics, GE and Intel meet every month to strategize on a series of initiatives.If you’re interested in joining the SEMI-MSIG Device Working Group, please contact Carmelo Sansone, Director of MEMS Sensors Industry Group.The MEMS Sensors Industry Group (MSIG) is a SEMI technology community that enables the MEMS and sensor industry to address common challenges, innovate and accelerate business results.Carmelo Sansone is director of the SEMI-MSIG. He has focused his career on building products and system solutions that have large impact in the marketplace. Sansone launched several sensor processor platforms for low-power applications, including the first microcontrollers with DSP capabilities, the core of today’s portable devices intelligence. Sansone has led the successful integration of the MSIG organization into SEMI by expanding its services and global reach. Carmelo holds a master’s degree in Electronic Engineering with a specialization in Biomedical from the University of Pisa and an MBA from Golden Gate University, San Francisco.

COVID-19 has had an impact on the entire healthcare market. During the peak of the first wave, companies from the industrial and automotive sectors worked on repurposing their sensors and production lines to provide pressure sensors for respirators and temperature sensors for thermometers. At the same time, companies making sensors for wearables and other mobile devices used for remote monitoring of patients experienced saw increased demand, caused in part by the surge in telemedicine worldwide. In addition, strong demand for COVID-19 tests pushed diagnostic players to repurpose existing systems to detect the SARS-CoV-2 virus or associated antibodies. Over the past six months in particular, numerous microfluidic technologies have enabled either rapid point-of-care tests or high-throughput solutions for central labs. The demand for these tests is incredibly high (millions of tests per month are needed), which has contributed to boosting the revenue of many companies in the respiratory-testing area.These respiratory-testing companies have placed many testing machines at existing and new customer sites, and have sold an impressive number of test kits resulting in an initial revenue spike in Q1 2020, and even higher spikes in Q2 and Q3. This growth seems on track to last into early 2021 and beyond as the pandemic continues, the flu season arrives, and health organizations test increasingly higher numbers of people than they were several months ago. The winners in respiratory testing include Abbott, bioMérieux, Cepheid, GenMark and Luminex, among many others. In this context, Yole expects the point-of-care segment of the microfluidic product market to enjoy an impressive jump from US$4.5 billion in 2019 to US$6.3 billion in 2020, growing at 15.1% CAGR between 2019 and 2025 to reach $10.4 billion in 2025. This represents 40% of the total microfluidic product market in 2019.In its research on microfluidics, Yole tracks a wide range of COVID-19 tests from different companies. The tests are used to meet different needs. Evolution of COVID-19 TestingNo doubt this increased production of tests will be especially useful for the upcoming flu season. But what will happen next year, if (we hope) reliable COVID-19 vaccines are validated and marketed, and the new coronavirus eventually disappears? Will diagnostic companies’ sales fall to pre-pandemic levels, and all these investments in production lines be wasted? Don’t worry. This is not a one-shot deal: Once the pandemic is over, most testing machines will remain in place, and customers will use them to run other tests the companies offer – usually for other kind of infectious diseases – driving sales of single-use disposables in coming years. The pandemic has shown us that more efficient diagnostic tools are required. Rapid, inexpensive, widely accessible testing for infectious diseases is crucial if we are to face such challenging situations. The real struggle for diagnostic companies, especially in the field of microfluidics where recent platforms have a small assay menu, is placing instruments (i.e., the test machines that run the disposable cartridges and read the results) at customers’ locations, from hospital settings and urgent care to field testing sites, and this has now been achieved. This will drive consumables sales in the future, even beyond the pandemic, and take the microfluidic-based point-of-care testing market to the next level. Rapid point-of-care testing is driving growth in microfluidics and will continue to do so for years to come. In the meantime, new significant opportunities are opening for point-of-care diagnostic test-makers, and rapid, miniaturized microfluidic technologies may be the winners here. Rapid passenger screening in airports, and rapid employee or visitor screening at the workplace will become essential for preventing the virus’ spread. In total, this could represent billions of rapid tests needed per year. COVID-19 has slowed down business growth in many areas but has really helped microfluidic-based point-of-care diagnostics take it to the next level, and this is only the beginning.For more information on Yole’s microfluidics activities, please view Yole’s reports, Point of Need 2020 – Including PCR-Based Testing or Status of Microfluidics Industry 2020 or visit i-Micronews.comYole Développement is a member of SEMI and the MEMS Sensors Industry Group (MSIG), a SEMI technology community that connects the MEMS and sensors supply network in established and emerging markets enabling members to grow and prosper. Visit us today. Sébastien Clerc is a technology and market analyst in Microfluidics, Sensing Actuating at Yole Développement (Yole). As part of the Photonics Sensing team, Clerc has authored a collection of market and technology reports dedicated to microfluidics and other micro-devices for major market segments: medical (including diagnostics, pharmaceutical, biotechnology, drug delivery, medical devices) and industrial (including environment, agro-food). At the same time, he is involved in custom projects such as strategic marketing, technology scouting, and technology evaluation to help academic and industrial players in their innovation processes. Thanks to his technology and market expertise, Clerc has spoken in more than 20 industry conferences worldwide over the last four years. Clerc holds a master’s degree in Biomedical Technologies and a master’s degree in Innovation and Technology Management, both from Grenoble Institute of Technology (Grenoble INP - Grenoble, France).

PNI Sensor, a member of the SEMI-MSIG Positioning, Navigation and Timing (PNT) Technical Advisory Council, is developing advanced tracking systems that promise to increase industrial worker safety.The availability of low-cost GPS jamming and spoofing technologies renders GPS-only solutions for location and navigation an increasingly dangerous and ineffective choice for the dismounted soldier in a battlefield environment. This threat to armed forces has spurred development of new self-contained location and navigation technologies for defense applications — an innovation that offers significant advantages for commercial applications.Though not as complex and mission-critical as in defense, self-contained location technology is also essential in commercially available industrial applications. That’s particularly true for workers in industrial sectors such as utilities, mining, and construction, and in environments with lone or remote workers, such as first responders. While jamming and spoofing are not a threat in the industrial sector, determining the precise location of workers in GPS-denied environments is fundamental to ensuring their safety. This makes it a priority to adapt any self-contained, non-infrastructure-based location technology — which was first developed for the modern dismounted soldier — to industrial applications.Bodies in MotionInertial solutions are very difficult to implement properly, even without the challenges uniquely created by human motion dynamics. On a construction site, for example, workers tend to cover a wide range of disciplines: supervisors, electricians, iron workers and equipment operators, among others. While performing their jobs, construction workers change locations, both indoors and outdoors, and perform dynamic motion such as crawling, ducking and climbing. These are all motions that are very difficult to model using traditional adaptive filtering techniques, which are typically applied in vehicular inertial navigation platforms, such as aircraft, ships and tanks. Even if existing inertial navigation systems could be made size, weight, power and cost (SWaP-C)-compatible to be body-worn, their performance accuracy would still need to satisfy the application’s requirements. To properly determine a worker’s precise location to ensure safety on job sites and in remote locations, we must tackle the combined challenges of SWaP-c and human dynamic motion. That’s the most effective approach for creating a complementary positioning technology that augments GPS or other infrastructure-based location systems.To address these challenges, we need to build a high-performance inertial measurement solution using commercially available MEMS inertial sensors. The issues of bias drift error and low sensitivity have traditionally made such sensors practically useless for any meaningful inertial tracking. Fortunately, this is no longer the case. We now have sensors that already conform to the necessary SWaP-C requirements for the application, and have the additional advantage of high dynamic range of measurements without saturation errors, which helps to reduce high-force and rapid movement-induced errors, promoting greater accuracy.Thus, a path forward is emerging. The current generation of high-performance MEMS gyros can now inertially track workers’ locations to step-level resolution very well for up to 30 minutes — without significant location errors due to bias or scale errors. That’s an order of magnitude better than previous generations. With the new MEMS gyros, errors typically remain less than 2% of distance travelled over that time period. Strategically applying algorithm improvements with higher levels of magnetic corrections has the potential to bring that accuracy down even lower, to less than 0.5% of distance traveled for durations of one hour or more. What’s more, the improved gyro and accelerometer bias, gain, and signal-to-noise (SNR) performance allows for better magnetic anomaly rejection. This enables finer and more sustained gyro bias corrections in the fused solution, which creates a system greater than the sum of its parts. We believe that these newer systems will promote greater worker safety at a truly affordable price.PNI Sensor, a member of the SEMI-MSIG PNT Technical Advisory Council (TAC), is developing a tracking system that combines the best elements of the newest-generation MEMS devices with an electronic compass that uses advanced magnetic anomaly detection and rejection algorithms. Based on PNI’s latest attitude and heading reference system (AHRS), the novel PNT system employs a unique Kalman algorithm that intelligently fuses its reference magnetic sensors with gyros and accelerometers. In conjunction with this work, PNI Sensor has developed advanced pedometry functionality for use in its tracking system for very high dead-reckoning tracking performance used in defense industry applications. PNI is initially designing that system to track dismounted soldiers and special forces operating in GPS-denied or contested environments.For more information about PNI Sensor’s advanced location and navigation technology, please visit PNI Sensor. To learn more about the SEMI-MSIG PNT TAC, please contact Carmelo Sansone, director, MEMS Sensors Industry Group.George Hsu is a founder and CTO of PNI Sensor. He has focused his career on the sensor industry, having invented several magnetic sensor breakthroughs, including the magneto-inductive technology, the core of today’s electronic compassing in the automotive, consumer, scientific and military markets. Hsu is a graduate of Stanford University School of Engineering, holds several patents, and is a much-published author of technical articles on sensor theory, design and applications. He is an active member of the MEMS Sensors Industry Group PNT TAC.About the SEMI-MSIG Positioning, Navigation and Timing ProjectMEMS Sensors Industry Group (MSIG) created a member-based PNT TAC to identify and pursue PNT system innovations for GPS-denied environments. To that end, MSIG solicited proposals from its membership for the SEMI-MSIG PNT Project, a U.S. Army Research Laboratory-funded R D project. PNT committee members that have secured funding are pursuing R D platforms that improve accuracy and performance. Platforms may include software, hardware, and advanced packaging requirements of optical and MEMS-based positioning and timing systems.

Not long after STMicroelectronics opened its first semiconductor plant in Singapore more than 50 years ago, a facility chiefly focused on chip assembly and packaging, the company realized that it had constructed the site in an area with a blossoming chip ecosystem with a bright future. Before long, the company became the first to start a wafer fab facility in the so-called Little Red Dot. Today, our STMicroelectronics Singapore campus sports several buildings that dwarf the original site in the sprawling Ang Mo Kio Industrial Park 2. The facilities feature advanced 200mm manufacturing lines but still produce huge volumes of chips with more than 1,000 pieces of 150mm manufacturing equipment.Much of the wafer equipment dates back to the past century so is no longer supported by the manufacturers, if they’re still even in existence. Yet decades later the chipmaking gear continues to operate with a surprising reliability that far surpasses the longevity called for in its manufacturing specifications thanks to replacement parts and frequent upgrades with more sophisticated handling robots and chucks. Now, as smart manufacturing begins to establish a foothold in the semiconductor industry, Industry 4.0 technology is breathing new life into these aging workhorses.Despite its age, all of the equipment adheres to industry manufacturing standards. The gear is remotely controlled using the SECS/GEM interface protocol that was either originally integrated with the equipment controller or custom-made. We’ve also maximized its usage through advanced recipe management, advanced alarm and event handling, and secured lot identification.Crucially, we decided to systematically deploy a real-time fault detection and classification (FDC) solution using a third-party product based on what today is known as an edge computing architecture. Every piece of critical processing equipment is progressively paired with its dedicated FDC instance running on a virtual machine in the wafer fab data center, and the FDC solution monitors vital equipment parameters at high frequency – depending on the SECS/GEM capabilities of the equipment – and analyzes incoming manufacturing data in real time using classic SPC (statistical process control) algorithms and even AI-class protocols.Our use of the FDC edge solution as a sensor signal aggregator has given our equipment a second life. The solution processes real-time signals from sensors connected through a typical TCP-IP. Sensors have been the old equipment’s saving grace with their ability to de-multiply equipment capabilities and overcome fundamental shortcomings and design weaknesses. The STMicroelectronics Singapore plant first used off-the-shelf sensor nodes with built-in power amplifier and analog input nodes. While very practical and easy to implement, deploying the nodes can be costly. After developing more expertise in sensor integration using FDC, our wafer fab equipment experts decided to design an in-house solution based on the famed STM32 microcontroller. Leveraging Arduino – an open-source electronics platform with easy-to-use hardware and software – the equipment teams can now design and program a variety of in-house sensors for measurements including temperature, humidity, waterflow and pressure. The sensors are integrated with process equipment using the FDC solution. Integrating the sensors with the FDC engine on the edge computer extends the capabilities of old equipment without jeopardizing the integrity of the machines themselves. While the integration can be quick, it must be robust to ensure the reliability of the new measurements. Similarly, ever-increasing connectivity requirements present clear cybersecurity risks that must be managed upfront and each solution must be hardened to minimize security vulnerabilities. Even so, the challenges and risks pale in comparison to the benefits! Jean-Marc PHILIPPE is DIT Director at STMicroelectronics Pte Ltd. He oversees the deployment and support of Digital Solutions to enable STMicroelectronics front-end operations in Singapore and manages manufacturing productivity and automation programs at site level.

Semiconductor process development is no easy task, with each generation of devices more difficult and expensive to create. Traditional cycles of build-and-test development are becoming obsolete, since they are too expensive and time-consuming for the most advanced processes.The High Cost of Process DevelopmentMost chip designers developing new products rely on existing manufacturing processes, but someone had to create those processes to make the designs possible. The goal of process development is to create new semiconductor manufacturing processes that provide high yield while achieving the required device performance. In contrast to new chip design, however, it requires an entirely different set of engineers and skills.The traditional approach to process development involves building multiple test wafers to determine the ideal process for a given device. After one set of wafers is fabricated and analyzed, insights from the previous round help to refine process steps for another round of fabrication. Due to smaller feature sizes, each new process generation is more sensitive to variation. This adds even more complexity because smaller feature sizes and parasitic effects require more measurements and testing as well as additional fabrication. The cycle is repeated many times before the entire process flow can be finalized, making it time- and cost-intensive, especially for the most advanced technology nodes.Testing Virtual Wafers Instead of Real WafersToday, there is an alternative to this slow, expensive way of doing things. Virtual fabrication lets computers simulate all of the processing that occurs when real wafers are built. These virtual models allow semiconductor process engineers to test manufacturing equipment settings with far greater variation than is possible in a physical fab. Designers can simulate the entire process flow, running the equivalent of thousands of wafers in days instead of months. Designers can quickly see graphical animations to visualize process steps, modify process recipes and device geometries, and measure how these changes affect electrical behavior.Improving Yield Using Statistics in Virtual Wafer FabricationBecause of the high volume of data generated, designers are turning to statistical analysis to provide greater confidence in their choice of process settings. Defects and random variations can be modeled in a virtual fab in a way that’s not possible in a real fab, letting developers test the sensitivity of the device structures against the unpredictable aspects of processing.There’s more than one approach to optimizing the process settings used in a new memory or logic fabrication sequence. The simplest one involves taking a single variable and exploring its effects. Critical dimensions (CDs), for example, establish those feature sizes of a device that ensure desired electrical performance. A particular dimension can be swept from low to high values – developers can then measure the effects of that range on device behaviors such as threshold voltage. This allows developers to ensure that the electrical behavior of their device design addresses the range of expected feature sizes and variability. The interactions with intersecting process steps can also be tested for further validation, since these interactions can lead to unanticipated device performance.But, in reality, this approach isn’t sufficient for studying the complex web of interactions between process steps and the resulting structures.A second approach leverages Monte Carlo analysis, randomly varying a wide range of process and device parameters and calculating the resulting device geometry and performance. This data can be used to automatically identify the process and design settings needed to achieve yield and performance goals. It’s an area where simulation shines, providing a useful way to test the interactions between many different processes.Statistical experiments using virtual fabrication illustrate step-by-step methodology to optimize process and design settingsVirtual Fabrication PlatformSEMulator3D is a virtual fabrication platform created by Coventor, a Lam Research company. It allows the definition of all process steps, the modeling of devices, the collection of metrics, electrical and device analysis, the statistical analysis of results, and the visualization of process steps through graphical animation. Today, semiconductor companies use it for both optimizing and scaling leading process nodes and for developing advanced new technologies like GAA (Gate-All-Around) transistors.The ability to do this work virtually is the future of semiconductor process development. Virtual fabrication accelerates new process time-to-market by months, opening up market opportunities worth hundreds of millions of dollars for semiconductor companies.Visualization of process steps of a Gate-All-Around transistor shows 3D construction in SEMulator3D. To learn more about virtual fabrication and how it’s changing the future of semiconductor technology development, download our whitepaper Speeding Up Process Optimization with Virtual Fabrication.Lam Research is a longtime member of MEMS Sensors Industry Group®, (MSIG), a SEMI technology community that connects the MEMS and sensors supply network in established and emerging markets, enabling members to grow and prosper. Visit us today.David M. Fried, Ph.D., is vice president of Computational Products at Lam Research, where he is responsible for the company’s strategic direction and implementation of virtual process solutions, including the Coventor SEMulator3D virtual fabrication 3D process modeling solution. Fried leads the execution of technology strategy for technology platforms, partnerships, and external relationships. His expertise touches upon such areas as Silicon-on-Insulator (SOI), FinFETs, memory scaling, strained silicon, and process variability.Fried is a well-respected technologist in the semiconductor industry, with 60 patents to his credit and a notable 14-year career with IBM, where he was involved in successive process generations from 65-nanometer and lower. His most recent position was 22nm chief technologist for IBM’s Systems and Technology Group. He holds bachelor’s, master’s and doctoral degrees in Electrical Engineering from Cornell University.Republished with permission from Lam Research.